Discharge-Current Characteristics in UV-Preionized Kr/He, F<sub>2</sub>/He Gas-Mixtures and KrF Excimer Laser Gas
نویسندگان
چکیده
منابع مشابه
Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures
Spatial and temporal gain profiles as well as the peak net gain at 193 nm have been measured in X-ray preionized discharges excited by a single pulse electrical system working in the charge transfer mode. Arand F2-containing laser gas mixtures with He or Ne as a buffer gas have been used. With a pumping pulse duration of ∼ 100 ns (FWHM) and a specific peak power deposition of ∼ 1 MW cm−3 bar−1 ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1992
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.112.8_516